Publications

2024

  • David Graves, Catherine Labelle, Mark Kushner, Eray Aydil, Vincent M Donnelly, Jane Chang, Peter Mayer, L. Overzet, Steven Shannon, Shahid Rauf, David N. Ruzic, “Science Challenges and Research Opportunities for Plasma Applications in Microelectronics”, Journal of Vacuum Science and Technology B, March 21, 2024 (Accepted for Publication).

2023

2022

2021

2020

2019

2018

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2015

2014

2013

2012

2011

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2009

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1984

  • Cohen, S., S. Bernabei, R. Budny, T. K. Chu, P. Colestock, E. Hinnov, W. Hooke, J. Hosea, D. Hwang, F. Jobes, D. Manos, R. Motley, D. N. Ruzic, J. Stevens, B. Stratton, S. Suckewer, S. Von Goeler, and R. Wilson, “Plasma-Materials Interactions During RF Experiments in TokamaksJournal of Nuclear Materials, Volume 128-129, Page 280-291 (1984)

1983

1982