UIUC Links

University of Illinois
Micro and Nanotechnology Laboratory
I3: Illinois Informatics Initiative
Engineering Research Centers at UIUC
ECE Machine Shop
Department of Nuclear, Plasma, and Radio
Center for Microanalysis of Materials

NSF Center

NSF/IUCRC Center for Laser & Plasma for Advanced Manufacturing

Books from CPMI

EUV Sources for Lithography (SPIE Press Monograph Vol. PM149)
Racing to a Cure: A Cancer Victim Refuses Chemotherapy and Finds Tomorrow’s Cures in Today’s Scientific Laboratories
Lithium Sputtering, Deposition and Evaporation: Controlled Thin Film Engineering

Related Links

XTREME: EUV Technology
University Fusion Association.
Plasma-Facing Components (ALPS).
Intel Research: EUVL
Good vacuum technology and pumps primer.
FIRE Place (& General Fusion)
eFunda: The Ultimate Online Reference
Cymer: EUV Research
Chemical Compatibility.
American Vacuum Society