The Second International Symposium on Plasma Nanoscience (iPlasmaNano-II) is being held in Australia from December 12-15 at the Murramarang Eco-Tourisim Resort located in South Durras, New South Wales, Australia.
The Symposium, this year, is organised at an expert-level to map the over all development of this rapidly growing reserach field and to prepare for the first-ever Special “Perspectives” issue of the Journal of Physics D: Applied Physics focused on the achievments, challenges and opportunities for the Plasma Nanosciences in the coming decade. The Symposium has many of the leading scientists and early-career researchers from all over the world participating.
Center for Plasma Materials and Interactions (CPMI) director, Prof. David Ruzic, will be representing the Center at this workshop and will give a presentation on Monday afternoon talking about High Energy Density Plasmas for Nano-fabrication.
Further details of the symposium can be found at http://www.acpo.csiro.au/iPlasmaNano/
You can also follow Prof. Ruzic (@EnergyProf) and the CPMI lab (@illinoisCPMI) at the conference on twitter.
Review of Scientific Instruments 81, 123502 (2010)
Flux and energy analysis of species in hollow cathode magnetron ionized physical vapor deposition of copper
L. Wu, E. Ko, A. Dulkin, K. J. Park, S. Fields, K. Leeser, L. Meng, and D. N. Ruzic
To meet the stringent requirements of interconnect metallization for sub-32 nm technologies, an unprecedented level of flux and energy control of film forming species has become necessary to further advance ionized physical vapor deposition technology. Such technology development mandates improvements in methods to quantify the metal ion fraction, the gas/metal ion ratio, and the associated ion energies in the total ion flux to the substrate. In this work, a novel method combining planar Langmuir probes, quartz crystal microbalance (QCM), and gridded energy analyzer (GEA) custom instrumentation is developed to estimate the plasma density and temperature as well as to measure the metal ion fraction and ion energy. The measurements were conducted in a Novellus Systems, Inc. Hollow Cathode Magnetron (HCMTM) physical vapor deposition source used for deposition of Cu seed layer for 65–130 nm technology nodes. The gridded energy analyzer was employed to measure ion flux and ion energy, which was compared to the collocated planar Langmuir probe data. The total ion-to-metal neutral ratio was determined by the QCM combined with GEA. The data collection technique and the corresponding analysis are discussed. The effect of concurrent resputtering during the deposition process on film thickness profile is also discussed. © 2010 American Institute of Physics.
CPMI graciously welcomes the Vice President and Chief Technical Officer from Novellus who will be visiting our laboratory this week. Welcome to the University of Illinois!
CPMI will be presenting at the 52nd Annual Meeting of the APS Division of Plasma Physics in Chicago, Illinois, Nov. 8-12.
(Click to view abstracts)
Monday, November 8, 2010
9:30 AM (Poster)
BP9.00046 : Triple Langmuir Probe Circuit Response to Dynamic Loading. Vijay Surla, Michael Jaworski, Joshua Kallman, Robert Kaita, Henry Kugel, David Ruzic
Tuesday, November 9, 2010
2:00 PM (Poster)
CP9.00115 : Upgrade of a Theta Pinch Plasma Source for Energetic Plasma Flow Generation and Fusion-Related Material Interaction Study. Soonwook Jung, Vijay Surla, David Ruzic
4:12 PM – 4:24 PM
JO7.00012 : Application of the Thermoelectric Effect on the Liquid Lithium Heat Transfer. Wenyu X, Vijay Surla, David Ruzic
Thursday, November 11, 2010
2:00 PM (Posters)
UP9.00020 : Apparatus for Seebeck Coefficient Measurements of Lithium-7 and Lithium-6. Maryann Tung, Vijay Surla, Wenyu Xu, David Ruzic, Dennis Mansfield
UP9.00021 : Chemical Erosion Studies of Lithiated Graphite. Priya Raman, Vijay Surla, David Burns, David Ruzic
The 57th International AVS Symposium and Exhibition is being held on October 17-22, 2010 in Albuquerque, New Mexico.
CPMI is giving the following presentations (Click title to view abstracts):
CPMI graduate students Wenyu Xu and Soonwook Jung both passed the PhD qualifiying examination held in August. CONGRATULATIONS on your performance!
CPMI will be welcoming two new postdoctoral researchers on September 16th. Both are experienced researchers and will be an asset to the CPMI team.
Tae Cho comes to us from Korea. He received his PhD in 2002 and has had 8 years of valued experience post PhD. He has been a postdoctoral researcher in the past, a Chief Engineer, and spent 5 years working in industry.
Daniel Andruczyk comes to us from Austrailia. He received his PhD in 2006 and has had 4 years of valued experience post PhD. He has previously been a postdoctoral researcher in two institutions.
WELCOME!
CPMI is pleased to welcome aboard our newest graduate student Jungmi Hong.
CPMI is pleased to welcome visiting graduate researcher, Heriberto Ortiz. Heriberto comes to us from Queretaro, Mexico and will be working throughout the Fall 2010 semester.
Members of the CPMI gathered to wish departing post-doc Vijay Surla well as he leaves the Urbana campus. Vijay has spent the past two years working with the atmospheric plasma and fusion plasma research at CPMI. He will continue his post-doc research of fusion plasmas at the Princeton Plasma Physics Laboratory along with other alums of the CPMI Michael Jaworski and Travis Gray.
Thank you for your work and good luck, Vijay!
