Time, Mass, and Energy Resolved Diagnostics

April 1, 2024

•Time and Energy resolved Mass Spectroscopy, allows for differentiation between metal and gas ions
• Ion Energy Distribution Functions (IEDF)
• Time resolved measurement of ion energy during a HiPIMS pulse showing energy increase during the kick
• Electron Energy Distribution Functions (EEDF)
• Shows the evolution of the electron energy as well as plasma density during the discharge