Sputtering High Purity Atomic Deposition Experiment (SHADE)

April 6, 2022

SHADE has two 4-inch PVD sputtering guns, a load-lock and a rotating sample stage.  It is also outfitted with detailed diagnostics to enable time-resolved measurements of HIPIMS discharges.  It is powered by a Starfire Industries IMPULSE that is capable of cathode-voltage reversal.  It has been used to make multi-layer mirrors, and do reactive sputtering experiments.