The Sealing Materials Degradation Chamber (SMDC) is designed to develop a deep and specialized knowledge around interactions of plasma with sealing materials. The SMDC is designed to test seals in both ion-rich and radical-rich environments, with the diagnostic capability to quantitatively understand these regimes. The IC fabrication industry requires seals that are robust over a long lifetime, and the knowledge gained in SMDC will help to push sealing technology forward.
Written by Nicholas Connolly
People Working on Experiment: Nicholas Connolly