J. Peck, “Laser-Assisted Plasma Etch of Semiconductor Materials,” Ph.D. Thesis, NPRE, University of Illinois at Champaign-Urbana, 2017.
J. Peck, “Modeling and experimental process optimization for a SiH4 + H2 surface wave plasma discharge for silicon photovoltaics,” M.S. Thesis, NPRE, University of Illinois at Champaign-Urbana, 2014.