Jack Stahl


I am currently researching how tin ions are stopped as they travel through hydrogen plasma. Tin plasmas are generated during the production of extreme ultraviolet light (EUV) when molten microdroplets of tin are struck by a CO2 laser. The contamination of critical vessel components with tin is a serious concern for ASML, the project sponsor, and they are interested in learning more about how ions from the tin plasma are stopped by the background gases and plasmas in their vessel. I am currently using an ion beam installed on the HARP chamber to measure how an ion beam attenuates as it travels through both hydrogen gas as well as hydrogen plasma generated by a helicon plasma source.

Email jtstahl2@nospam66992c22594a3.illinois.edu