Dr. Daniel Elg

Biography

D. T. Elg, “Removal of tin from exterme ultraviolet collector optics by an in-situ hydrogen plasma,” Ph.D. Thesis, NPRE, University of Illinois at Champaign-Urbana, 2016.
D. T. Elg, “Magnetic mitigation of energetic ions for extreme ultraviolet lithography sources,” M.S. Thesis, NPRE, University of Illinois at Champaign-Urbana, 2013.