Corey Ray Mitchell Struck
Biography
C. Struck, “Reduction of Line Edge Roughness in Semiconductor Photoresist by Means of a Grazing Incidence Ion Beam,” M.S. Thesis, NPRE, University of Illinois, Champaign-Urbana, 2010.
CPMI Center for Plasma-Material Interactions
View our YouTube Videos Subscribe to our NewsC. Struck, “Reduction of Line Edge Roughness in Semiconductor Photoresist by Means of a Grazing Incidence Ion Beam,” M.S. Thesis, NPRE, University of Illinois, Champaign-Urbana, 2010.