Dr. Yuilun Wu
Biography
Y. Wu, “Diagnostics for ionized physical vapor deposition chambers,” Ph.D. Thesis, NPRE, University of Illinois at Champaign-Urbana, 2016.
Y. Wu, “Deposition of aluminum oxide by evaporative coating at atmospheric pressure (ECAP),” M.S. Thesis, NPRE, University of Illinois at Champaign-Urbana, 2013.