Jeffrey Lyle Wilson
Biography
J. Wilson, “Measurement of Process Plasma Parameters in a RF Capacitively Coupled Device,” M.S. Thesis, NPRE, University of Illinois, Champaign-Urbana, 1989.
CPMI Center for Plasma-Material Interactions
J. Wilson, “Measurement of Process Plasma Parameters in a RF Capacitively Coupled Device,” M.S. Thesis, NPRE, University of Illinois, Champaign-Urbana, 1989.