GALAXY

This is a PVD sputtering tool manufactured by the Material Research Corporation (MRC).  It uses a 14 inch diameter target and a rotating magnet pack.   We have outfitted it with a variety of HIPIMS power supplies, used a variety of magnet packs, diagnostics and internal ionization coils.

Center for Plasma-Material Interactions
201 S Goodwin Ave
Urbana, IL 61820
Email: mpo3@illinois.edu