Current Projects

Fusion Technology

Fusion research at CPMI centers around interactions of the plasma with the inner wall and divertor. In particular, liquid lithium walls are studied for low recycling operation in reactors. CPMI has its own fusion device, the stellarator HIDRA, which is capable of steady state plasma operations.

Industrial Plasma Processing

Industrial plasma processing research at CPMI focuses on using plasma to modify the surfaces of materials either through deposition or removal of material and advancing technologies. Our goal is to make manufacturing and treatment processes cleaner, cheaper, and faster.

Semiconductor Plasma Engineering

Semiconductor processing engineering at CPMI focuses on developing the machines that make the chips we all use in our modern technology. At CPMI we focus not just on the manufacturing side, but also the EUVL light sources and how to keep the optics clean of impurities that are generated.

Center for Plasma-Material Interactions
201 S Goodwin Ave
Urbana, IL 61820
Email: mpo3@illinois.edu