XTREME Commercial EUV Experiment and Diagnostics (XCEED)

April 6, 2022

XCEED is an XTS-13-35 EUV source made by Xtreme Technologies.  The same model source was used to make the very first chips that used EUV lithography in INTEL’s MET tool.  It uses a discharge-produced plasma from a Z-pinch and puts 5 J of energy into the plasma in 5ns.    This device will be re-purposed to study warm-dense matter in a project funded by Los Alamos National Laboratory.