The Effects of Surface Roughness Characterized by Fractal Geometry on Sputtering

April 1, 1990

Nucl. Instr. Meth. B, 47, 118-125 (1990).

Ruzic, D. N.

Fractal geometry has been added to the binary-collision TRIM computer code to simulate realistic atomic-scale surface roughness. This inclusion significantly affects TRIM sputtering yields and reflection coefficients at low energies (10s to 100s of eV) and non-normal angles of incidence. Results are shown and favorably compared to experiments for H and C sputtering of C as a function of angle, energy and fractal dimension. Energy and angular distributions of the sputtered and reflected particles as a function of fractal dimension are also shown.