J. Vac. Sci. Technol., B 6, 485-490 (1988).
Cain, B. L., Ruzic, D. N., Bastasz, R.
An ion beam decelerator for energies down to 5 eV isdescribed. The decelerator is a Menzinger retardation system that has been modified according to the results of calculations using a ray tracing model to optimize lens geometry. Performance tests of the decelerator demonstrate that H beams with currents 20 nA can be obtained with a spot size adjustable from 0.5 to 10 mm using a beam raster system.