Dr. Wayne M. Lytle

Biography

W. M. Lytle, “Removal of Organic contaminants from Lithographic Materials,” Ph.D.Thesis, NPRE, University of Illinois, Champaign-Urbana, 2011.
W. M. Lytle, “Plasma-Assisted Cleaning by Electrostatics of Insulating Nanometer Scale Contamination from Materials Used in Integrated Circuit Manufacturing,” M.S.Thesis, NPRE, University of Illinois, Champaign-Urbana, 2007.