Dr. John R. Sporre

Biography

J.R. Sporre, “Diagnosis of the Flux Emanating from the Intermediate Focus of an Extreme Ultraviolet Light Lithography Source,” Ph.D.Thesis, NPRE, University of Illinois, Champaign-Urbana, 2013.

J.R. Sporre, “Detection of Energetic Neutral Flux Emanating from Extreme Ultraviolet Light Lithography Sources,” M.S.Thesis, NPRE, University of Illinois, Champaign-Urbana, 2010.