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Center Director

Dr. David Ruzic, PhD
217-333-0332 (work)
217-840-3282 (cell)
druzic@illinois.edu

Affiliate Faculty Members

Dr. Jean Paul Allain, PhD
 allain@illinois.edu
Dr. Davide Curreli, PhD
dcurreli@illinois.edu
 Dr. Daniel Andruczyk, PhD
andruczy@illinois.edu
Daniel’s website: Website
Dr. Angus Rockett, PhD
217-333-0417
arockett@illinois.edu
Dr. Eric Pop, PhD
217-244-2070
epop@illinois.edu
Dr. Gang Logan Liu, PhD
217-244-4349
loganliu@illinois.edu
Dr. Lynford Goddard, PhD
217-244-0799
lgoddard@illinois.edu
Dr. Xiuling Li, PhD
217-265-6354
xiulingli@illinois.edu

Adjunct Faculty

Dr. Brian E. Jurczyk, PhD
bjurczyk@starfireindustries.com
Dr. Robert Stubbers, PhD
rstubbers@starfireindustries.com

Coordinator of Research Programs

Joshua Gasienica
217-300-3540
gasienc2@illinois.edu

Postdoctoral Research Scientists

Dr.Kishor K. Kalathirapambil, PhD
kishor@illinois.edu
Dr.Ivan A. Shchelkanov, PhD
shchelka@illinois.edu

Graduate Students

Michael Christenson
mpchris2@illinois.edu
Daniel Elg
delg2@illinois.edu
Peter Fiflis
fiflis1@illinois.edu
Kyle Lindquist
lindqui1@illinois.edu
Jason Peck
peck3@illinois.edu
Priya Raman
raman6@illinois.edu
Roland Wu
rolandwu2004@gmail.com
Wenyu Xu
wenyuxu1@illinois.edu
Matthew Szott
szott1@illinois.edu
Pawel Piotrowicz
ppiotr3@illinois.edu

Undergraduate Assistants (Spring 2013)

Alex Press press4@illinois.edu
Amanda Lietz lietz3@illinois.edu
David Lee dlee210@illinois.edu
David Peterson peters45@illinois.edu
Hyunho Yun yun12@illinois.edu
Jack Meister jmeiste2@illinois.edu
Jake McLain jmclain2@illinois.edu
Jeffrey Zhou zhou30@illinois.edu
Leo Kirsch kirsch2@illinois.edu
Louis Chapdelaine chapdel2@illinois.edu
Matthew Szott szott1@illinois.edu
Nicholas Connolly connlly2@illinois.edu
Stephen Kleppinger kleppin1@illinois.edu
Travis Mui mui5@illinois.edu
Vikrum Joshi joshi16@illinois.edu

Previous Postdoctoral Research Scientists

Dr. Jean Paul Allain, PhD

Dr. Brian Jurczyk, PhD

Dr. Robert Stubeers, PhD

Dr. Darren Alman, PhD

Dr. Eric Antonsen, PhD

Dr. Shailendra Srivistava, PhD

Dr. Carlos Castano, PhD

Dr. Ramasamy Raju, PhD

Dr. Martin Neumann, PhD

Dr. Randolph Fauta, PhD

Dr. Vijay Surla, PhD

Dr. Kyongnam Kim, PhD

Dr. Daniel Andruczyk, PhD

Dr. Tae S. Cho, PhD

tscho@iee.org

Alumni

Doctoral Students

Dr. John R. Sporre

J.R. Sporre, “Diagnosis of the Flux Emanating from the Intermediate Focus of an Extreme Ultraviolet Light Lithography Source,” Ph.D.Thesis, NPRE, University of Illinois, Champaign-Urbana, 2013.

J.R. Sporre, “Detection of Energetic Neutral Flux Emanating from Extreme Ultraviolet Light Lithography Sources,” M.S.Thesis, NPRE, University of Illinois, Champaign-Urbana, 2010.

Contact:

Dr. Wayne M. Lytle

W. M. Lytle, “Removal of Organic contaminants from Lithographic Materials,” Ph.D.Thesis, NPRE, University of Illinois, Champaign-Urbana, 2011.

W. M. Lytle, “Plasma-Assisted Cleaning by Electrostatics of Insulating Nanometer Scale Contamination from Materials Used in Integrated Circuit Manufacturing,” M.S.Thesis, NPRE, University of Illinois, Champaign-Urbana, 2007.

Contact:

Dr. Hyung Joo Shin

H. J. Shin, “Cleaning of Tin Debris by Reactive Ion Etching in a Discharge-Produced EUV Plasma Source,” Ph.D.Thesis, NPRE, University of Illinois, Champaign-Urbana, 2009.

Contact:

Dr. Michael Andrew Jaworski

M. A. Jaworski, “Thermoelectric Magnetohydrodynamic and Thermocapillary Driven Flows of Liquid Conductors in Magnetic Fields,” Ph.D.Thesis, NPRE, University of Illinois, Champaign-Urbana, 2009.

M. A. Jaworski, “Debris Reduction by Means of a Secondary Plasma System with a Dense Plasma Focus Extreme Ultraviolet Light Source,” M.S. Thesis, NPRE, University of Illinois, Champaign-Urbana, 2006.

Contact:

Dr. Travis Gray

T. Gray, “Bombardment of Thin Lithium Films with Energetic Plasma Flows,” Ph.D.Thesis, NPRE, University of Illinois, Champaign-Urbana, 2009.

Contact:

Dr. Martin John Neumann

M. J. Neumann, “Lithium Debris Removal By Sputtering and Evaporation for EUV Optics and Applications,” Ph.D. Thesis, NPRE, University of Illinois, Champaign-Urbana, 2007.

M. J. Neumann, “Investigation of Plasma Processing of Polymers for Use in Biomedical Applications,” M.S. Thesis, NPRE, University of Illinois, Champaign-Urbana, 2004.

Contact:

Dr. Huatan Qiu

J. Qui, “Gibbsian Segregating Alloys Driven by Thermal and Concentration Gradients – A Potential Grazing Collector Optics Used in EUV Lithography,” Ph.D. Thesis, NPRE, University of Illinois, Champaign-Urbana, 2007.

J. Qui, “Molecular Dynamics Modeling of Hydrogen in Liquid Lithium Surfaces Relevant to Fusion Devices,” M.S. Thesis, NPRE, University of Illinois, Champaign-Urbana, 2005.

Contact:

Dr. Mathew David Coventry

M. D. Coventry, “Temperature-Enhanced Low-Energy Ion Sputtering of Liquid Sn: Measurements and Modeling,” Ph.D. Thesis, NPRE, University of Illinois, Champaign-Urbana, 2007.

M. D. Coventry, “Measurement of the Sputtering Yields of Solid and Liquid Tin Due to Low-Energy, Light-Ion Bombardment at Oblique Incidence,” M.S. Thesis, NPRE, University of Illinois, Champaign-Urbana, 2004.

Contact:

Dr. Carlos Henry Castano

C. H. Castano, “Study of Breakdown/Arcing for High Power RF Antennas on Fusion Applications,” Ph.D. Thesis, NPRE, University of Illinois, Champaign-Urbana, 2006.

Contact:

Dr. Ning Li

L. Ning, “Chemically Enhanced Physical Vapor Deposition (CEPVD) of Tantalum Nitride-Based Films for Diffusion Barrier Layers Used in ULSI Devices,” Ph.D. Thesis, NPRE, University of Illinois, Champaign-Urbana, 2004.

L. Ning, “Ionized Physical Vapor Deposition of Aluminum Oxide,” M.S. Thesis, NPRE, University of Illinois, Champaign-Urbana, 2002.

Contact:

Dr. Martin de Jesus Nieto-Perez

M. J. Nieto-Perez, “Study of Plasma/Flowing Liquid Metal Interactions,” Ph.D. Thesis, NPRE, University of Illinois, Champaign-Urbana, 2004.

Contact:

Dr. Darren Alman

D. Alman, “Molecular Dynamics Simulations of Carbon/Hydrocarbon-Surface Interactions Relevant to Fusion Devices,” Ph.D. Thesis, NPRE, University of Illinois, Champaign-Urbana, 2003.

D. Alman, “A Model of Hydrocarbon Reactions and Wall Interactions in Low Temperature Hydrogen Plasmas,” M. S. Thesis, NPRE, University of Illinois, Champaign-Urbana, 2001.

Contact:

Dr. Jean Paul Allain

J. P. Allain, “Kinematic and Thermodynamic Effects on Liquid Lithium Sputtering,” Ph.D. Thesis, NPRE, University of Illinois, Champaign-Urbana, 2001.

J. P. Allain, “Measurement and Modeling of Lithium Sputtering,” M.S. Thesis, NPRE, University of Illinois, Champaign-Urbana, 2000.

Contact:

Dr. Douglas Brenton Hayden

D. B. Hayden, “Secondary Plasma Sources For Ionized Physical Vapor Deposition,” Ph.D. Thesis, NPRE, University of Illinois, Champaign-Urbana, 1999.

D. B. Hayden, “Neutral Particle Modeling in the ITER Divertor,” M.S. Thesis, NPRE, University of Illinois, Champaign-Urbana, 1995.

Contact:

Dr. Preston Craig Smith

P. C. Smith, “Low-Energy Ion-Induced Angularly-Resolved Sputtering Measurements,” Ph.D. Thesis, NPRE, University of Illinois, Champaign-Urbana, 1997.

P. C. Smith, “Low-Energy Ion-Induced Electron Emission from Gas-Covered Surfaces,” M.S. Thesis, NPRE, University of Illinois, Champaign-Urbana, 1997.

Contact:

Dr. Robert Bruce Turkot, Jr.

R. B. Turkot, “Plasma-Material Interactions: A Langmuir Probe Analysis of a Cylindrical SiO2 Deposition System and a Computational Study Using VFTRIM3D,” Ph.D. Thesis, NPRE, University of Illinois, Champaign-Urbana, 1997.

R. B. Turkot, “Time- and Space-Resolved RF-Plasma Measurements froma Displacement-Current-Based Electric Probe Diagnostic,” M.S. Thesis, NPRE, University of Illinois, Champaign-Urbana, 1992.

Contact:

Dr. Mohammad A. Shaheen

M. A. Shaheen, “Pulsed Sheet Electron Beam Plasma Assisted CVD of Silicon Films,” Ph.D. Thesis, NPRE, University of Illinois, Champaign-Urbana, 1997.

M. A. Shaheen, “A Fractal Surface Model for Multi-Component Trim: Applications to Boron-Carbon Materials,” M.S. Thesis, NPRE, University of Illinois, Champaign-Urbana, 1991.

Contact:

Dr. John Belton O’Neil II Caughman

J. B. O. Caughman, “The Distribution of Ion Energies Incident on an ICRH Antenna Faraday Shield,” Ph.D. Thesis, NPRE, University of Illinois, Champaign-Urbana, 1989.

J. B. O. Caughman, “The Effects of RF on the Sputtering of ICRH Antenna Faraday Shields,” M.S. Thesis, NPRE, University of Illinois, Champaign-Urbana, 1986.

Contact:

Dr. Bruce Lamar Cain

B. L. Cain, “Analysis of Low Energy Neutral Hydrogen Fluxes Using an Electron Cyclotron Resonance Heated Discharge,” Ph.D. Thesis, NPRE, University of Illinois, Champaign-Urbana, 1989.

Contact:

Master’s Students

Robert Lofgren

R. Lofgren, “Surface Cleaning of Optics by Plasma (SCOPE) with Atomic Hydrogen,” M.S. Thesis, NPRE, University of Illinois, Champaign-Urbana, 2010.

Contact:

Corey Ray Mitchell Struck

C. Struck, “Reduction of Line Edge Roughness in Semiconductor Photoresist by Means of a Grazing Incidence Ion Beam,” M.S. Thesis, NPRE, University of Illinois, Champaign-Urbana, 2010.

Contact:

Kenzo Steve Ibano

K. Ibano, “Thermal Evaporation and Sputtering Studies of Lithium and Lithiated Graphite,” M.S. Thesis, NPRE, University of Illinois, Champaign-Urbana, 2009.

Contact:

Marin Z. Racic

M. Racic, “Experimental Erosion Study of Lithium-on-Carbon Surfaces for Fusion Devices,” M.S. Thesis, NPRE, University of Illinois, Champaign-Urbana, 2008.

Contact:

Joshua A. Spencer

J. Spencer, “Ion Energy Characterization Study for Next Generation Semiconductor Lithography Based on Gas Discharge Produced Plasma Technology,” M.S. Thesis, NPRE, University of Illinois, Champaign-Urbana, 2007.

Contact:

Benjamin Charles Masters

B. Master, “Development and Characterization of Conventional and Inverted Helicon Plasma Sources,” M.S. Thesis, NPRE, University of Illinois, Champaign-Urbana, 2007.

Contact:

Benjamin James Schultz

B. Schultz, “Design and Characterization of a Plasma Source for Ion Bombardment,” M.S. Thesis, NPRE, University of Illinois, Champaign-Urbana, 2007.

Contact:

Wieslaw W. Olczak

W. Olczak, “Thermal Desorption Spectroscopy Measurements of Hydrogen Retention in Flowing Liquid Lithium,” M.S. Thesis, NPRE, University of Illinois, Champaign-Urbana, 2006.

Contact:

Jeffrey E. Norman

J. Norman, “Langmuir Probe Investigations of Helicon Wave Discharges in Three-Dimensions of a Commercial-Scale Plasma Processing Reactor,” M.S. Thesis, NPRE, University of Illinois, Champaign-Urbana, 2002.

Contact:

Rajiv Ranjan

R. Ranjan, “Measurements and Modeling of Ti and TiN Sputtering,” M.S. Thesis, NPRE, University of Illinois, Champaign-Urbana, 2000.

Contact:

Monica Marie Cortez Allain

M. Cortez, “Characterization of Magnetron-Sputtered Partially Ionized Deposition as a Function of Metal and Gas Species,” M.S. Thesis, NPRE, University of Illinois, Champaign-Urbana, 2000.

Contact:

Karyn Melissa Green

K. Green, “Determination of Ionization Fraction and Plasma Potential in a DC Magnetron Sputtering System Using a Quartz Crystal Microbalance and a Gridded Energy Analyzer,” M.S. Thesis, NPRE, University of Illinois, Champaign-Urbana, 1997.

Contact:

James Patrick Kelly

J. Kelly, “Tritium Inventory in the Neutral Beam Box of TFTR,” M.S. Thesis, NPRE, University of Illinois, Champaign-Urbana, 1995.

Contact:

Lisa Anne Haynes

L. Haynes, “Tritium Inventory in the Vacuum Vessel and Pumping Ducts of TFTR,” M.S. Thesis, NPRE, University of Illinois, Champaign-Urbana, 1995.

Contact:

Regina Marie DeMers

R. DeMers, “Investigation of a Direct Current Cylindrical Hollow Cathode Glow Discharge Device for Use as a Remote Plasma Source for the Growth of Amorphous Silicon Thin Films,” M.S. Thesis, NPRE, University of Illinois, Champaign-Urbana, 1991.

Contact:

Bozhao Hu

B. Hu, “Measurements of Secondary Electron Yield From Low-Energy Ion Interactions with Gas Covered Surfaces,” M.S. Thesis, NPRE, University of Illinois, Champaign-Urbana, 1990.

Contact:

Phi Long Nguyen

P. Nguyen, “A Novel Device for Energy Distribution Measurements in an RF Plasma Discharge,” M.S. Thesis, NPRE, University of Illinois, Champaign-Urbana, 1990.

Contact:

Jeffrey Lyle Wilson

J. Wilson, “Measurement of Process Plasma Parameters in a RF Capacitively Coupled Device,” M.S. Thesis, NPRE, University of Illinois, Champaign-Urbana, 1989.

Contact:

Henry Kui Chuen Chiu

H. Chiu, “The Reflection of Hydrogen Off Nickel Surfaces as a Function of Fractal Dimension,” M.S. Thesis, NPRE, University of Illinois, Champaign-Urbana, 1987.

Contact: