Dr. Mohammad A. Shaheen

Biography

M. A. Shaheen, “Pulsed Sheet Electron Beam Plasma Assisted CVD of Silicon Films,” Ph.D. Thesis, NPRE, University of Illinois, Champaign-Urbana, 1997.
M. A. Shaheen, “A Fractal Surface Model for Multi-Component Trim: Applications to Boron-Carbon Materials,” M.S. Thesis, NPRE, University of Illinois, Champaign-Urbana, 1991.