UIUC Links
University of Illinois
Micro and Nanotechnology Laboratory
I3: Illinois Informatics Initiative
Engineering Research Centers at UIUC
ECE Machine Shop
Department of Nuclear, Plasma, and Radio
Center for Microanalysis of Materials
Books from CPMI
EUV Sources for Lithography (SPIE Press Monograph Vol. PM149)
Racing to a Cure: A Cancer Victim Refuses Chemotherapy and Finds Tomorrow’s Cures in Today’s Scientific Laboratories
Lithium Sputtering, Deposition and Evaporation: Controlled Thin Film Engineering
Related Links
XTREME: EUV Technology
University Fusion Association
SPIE
Sematech
Plasma-Facing Components (ALPS)
Intel Research: EUVL
Good vacuum technology and pumps primer
FIRE Place (& General Fusion)
eFunda: The Ultimate Online Reference
Cymer: EUV Research
Chemical Compatibility
American Vacuum Society