Plasma Sources Sci. Technol., 2, 100-105 (1993). Schatz, K. D., Ruzic, D. N. The operation of an electron-beam plasma source and its application as a secondary source of ionization in a radio frequency- (RF) powered reactive-ion-etching (RIE) reactor is investigated. RF-powered RIE is an important tool in the manufacture of semiconductor devices. One aspect of […]Authors: Schatz, K. D., Ruzic, D. N.
Archive for May, 1993
Center for Plasma-Material Interactions | University of Illinois at Urbana-Champaign Archives
Dr. Martin Nieto Returns to CPMI for Month-Long CollaborationJuly 17, 2014
Dr. Martin Nieto, who received both his Master’s (2000) and Doctorate (2004) from the University of Illinois in Nuclear Engineering, has returned for a month-long research collaboration at CPMI. Dr. Nieto has been a regular collaborator of NPRE professor Dr. Jean Paul Allain and has also published with Dr. David Ruzic in the past. Dr. […]
CPMI Welcomes Dr. Francisco TabarésJuly 17, 2014
Dr. Francisco Tabarés, a fusion researcher at CIEMAT (Centro de Investigaciones Energéticas, Medioambientales y Tecnológicas), a large multi-discliplinary laboratory in Madrid, Spain, has arrived for a short research collaboration with the CPMI faculty and students. Dr. Tabarés will remain in Urbana-Champaign until the 27th of July.
CPMI Graduate Student Priya Raman Selected as Finalist for 2014 AVS Student AwardJune 12, 2014
Priya Raman was recently selected as a finalist for the American Vacuum Society’s 2014 prestigious national student awards. Raman’s primary area of research is understanding High-Powered Pulsed Magnetron Sputtering (HPPMS or HiPMS). She is one of eight finalists for AVS’ five national awards which recognize excellent research in the areas of vacuum systems, materials, and […]