Featured Projects:
Buy MegaHoodia Saturday Delivery

J. Vac. Sci. Technol., A, 9, 682-687 (1991). Nguyen, P. L., Turkot Jr., R. B., Ruzic, D. N. A compact and inexpensive cubical energy analyzer has been developed to measure ion and electron energy distributions at the boundaries of a rf plasma. It consists of two grids parallel to the plasma boundary behind which lies […]

Authors: Nguyen, P. L., Turkot Jr., R. B., Ruzic, D. N.

J. Vac. Sci. Technol., A, 9, 614-618, (1991). Myers, A. M., Doyle, J. R., Abelson, J. R., Ruzic, D. N. Monte Carlo simulations of the particle transport process during dc magnetron sputter deposition were performed to determine the energy and angular distributions of the energetic deposition species. The model itself is quite general, and here […]

Authors: Myers, A. M., Doyle, J. R., Abelson, J. R., Ruzic, D. N.

J. Vac. Sci. Technol., A, 9, 702-706 (1991). Rossnagel, S. M., Schatz, K., Whitehair, S. J., Guarnieri, C. R., Ruzic, D. N., Cuomo, J. J. In a conventional, axial electron cyclotron resonance (ECR) plasma source, the substrate is typically in the diverging magnetic field region immediately downstream from the ECR region. Due to the high […]

Authors: Rossnagel, S. M., Schatz, K., Whitehair, S. J., Guarnieri, C. R., Ruzic, D. N., Cuomo, J. J.