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J. Vac. Sci. Technol., A, 7, 1092-1098 (1989). Caughman, J. B. O., Ruzic, D. N., Hoffman, D. H. Large variations in the plasma potential can lead to large sheath potentials at the surface of the Faraday shield of anion cyclotron resonance heating (ICRH) antenna. This sheath can accelerate ions to energies where sputtering is significant, […]

Authors: Caughman, J. B. O., Ruzic, D. N., Hoffman, D. H.

J. Vac. Sci. Technol., A, 7, 972-976 (1989). Wilson, J. L., Caughman, J. B. O., Nguyen, P. L., Ruzic, D. N. Argon plasma measurements were conducted in a commercial capacitively coupled etcher operating at 400 mTorr with 60-W coupled power at 13.56 MHz. Time varying floating potential was measured using a capacitively coupled probe which […]

Authors: Wilson, J. L., Caughman, J. B. O., Nguyen, P. L., Ruzic, D. N.