Sn Cleaning with Reactive Ion Etching

Cleaning Sn off from EUV optics by plasma etching method Sn is more preferable among fuel materials for EUV light source since Sn has better conversion efficiency than other materials (Xe and Li). However, Sn is a condensable material so that it builds up on the EUV optics (collectors or mirrors). Debris build-up will roughen […]